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["レーザーアニール照射依頼シート　(試験照射用)",{"$nulls":68},"ご依頼日"]
[{"$nulls":56},"(会社名、部署、ご担当者名)"]
["照射対象",{"$nulls":25},"ウエハ到着予定日"]
[]
[]
["ケース形状",{"$nulls":7},"　",{"$nulls":17},"ウエハ返却希望日",{"$nulls":29},"（電話番号）",{"$nulls":7},"-"]
[]
[{"$nulls":56},"（緊急時電話番号）",{"$nulls":7},"-"]
[]
["レーザーアニール装置",{"$nulls":7},"SWA-90GDA",{"$nulls":10},"ウエハ径",{"$nulls":16},"ウエハ形状",{"$nulls":20},"機種名"]
[]
[]
["ロット名",{"$nulls":5},"ウエハ　　　　　　　　　　　No.",null,null,"枚数",null,"レーザー種　　　　",{"$nulls":6},"周波数\n[kHz]",null,null,null,"パルス幅\n[μs]",null,null,null,"エネルギー密度\n［J/cm2］",null,null,null,"Delay Time\n[nsec]",null,null,null,"Over Lap [%]\nScan / Step",{"$nulls":7},"照射エリア",{"$nulls":7},"エッジカット*1\n[mm]",null,null,null,"照射面",null,null,null,"照射雰囲気",null,null,null,"ウエハ厚\n[㎛]",null,null,null,"Tape / Glass\n合計厚み[μm]",{"$nulls":7},"照射順序"]
[]
[]
[{"$nulls":11},"　"]
[{"$nulls":11},"　"]
{"$rows_empty":16}
["　連絡事項",{"$nulls":5},"　(お客様　コメント欄)",{"$nulls":29},"　(住重アテックス　コメント欄)"]
[]
[]
[]
[]
[]
["輸送箱数",{"$nulls":8},"箱数："]
["（返却先住所）",{"$nulls":35},"工番",{"$nulls":34},"内容確認","品質技術G"]
[{"$nulls":72},"月　　　日　"]
[]
[{"$nulls":72},"印"]
[]
["（返却先電話番号）"]
[]
["*1：画像アライメントが登録できない場合、画像アライメントなしのエッジカット3mmでの処理となります。",{"$nulls":65},"シート更新時確認欄"]
[{"$nulls":66},"お客様確認",{"$nulls":5},"住重アテックス確認"]
[{"$nulls":66},"月　　　日　",{"$nulls":5},"月　　　日　"]
[]
[]
[{"$nulls":66},"サイン",{"$nulls":5},"サイン"]
[{"$nulls":78},"FPC720107_00"]

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["レーザーアニール照射依頼シート　(試験照射用)",{"$nulls":68},"ご依頼日",null,null,null,"2020-02-04"]
[{"$nulls":56},"(会社名、部署、ご担当者名)"]
["照射対象",{"$nulls":25},"ウエハ到着予定日",{"$nulls":6},"2020-02-04",{"$nulls":22},"○○株式会社"]
[{"$nulls":56},"半導体デバイス事業部　開発部　試験課"]
[{"$nulls":56},"検査太郎"]
["ケース形状",{"$nulls":7},"プロトスケース",{"$nulls":17},"ウエハ返却希望日",{"$nulls":6},"2020-02-14",{"$nulls":22},"（電話番号）",{"$nulls":7},"03-××××-××××"]
[]
[{"$nulls":56},"（緊急時電話番号）",{"$nulls":7},"090-××××-××××"]
[]
["レーザーアニール装置",{"$nulls":7},"SWA-90GDA",{"$nulls":10},"ウエハ径",{"$nulls":16},"ウエハ形状",{"$nulls":20},"機種名"]
[]
[]
["ロット名",{"$nulls":5},"ウエハ　　　　　　　　　　　No.",null,null,"枚数",null,"レーザー種　　　　",{"$nulls":6},"周波数\n[kHz]",null,null,null,"パルス幅\n[μs]",null,null,null,"エネルギー密度\n［J/cm2］",null,null,null,"Delay Time\n[nsec]",null,null,null,"Over Lap [%]\nScan / Step",{"$nulls":7},"照射エリア",{"$nulls":7},"エッジカット*1\n[mm]",null,null,null,"照射面",null,null,null,"照射雰囲気",null,null,null,"ウエハ厚\n[㎛]",null,null,null,"Tape / Glass\n合計厚み[μm]",{"$nulls":7},"照射順序"]
[]
[]
["AAA-01",{"$nulls":5},"1-25",null,null,25,null,"Green",{"$nulls":6},3,null,null,null,"-",null,null,null,2,null,null,null,500,null,null,null,"67/50",{"$nulls":7},"all　area",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"N2",null,null,null,200,null,null,null,"-",{"$nulls":7},"Gr → IR"]
["AAA-01",{"$nulls":5},"1-25",null,null,25,null,"IR",{"$nulls":6},1,null,null,null,25,null,null,null,"-0.2 *1",null,null,null,"-",null,null,null,"67/50",{"$nulls":7},"all　area",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"N2",null,null,null,200,null,null,null,"-",{"$nulls":7},"Gr → IR"]
[]
["BBB-02",{"$nulls":5},"1-10",null,null,10,null,"IR",{"$nulls":6},1,null,null,null,20,null,null,null,"-0.2 *1",null,null,null,"-",null,null,null,"67/50",{"$nulls":7},"area 1 *2",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"AIR",null,null,null,100,null,null,null,"-",{"$nulls":7},"-"]
["BBB-02",{"$nulls":5},"1-10",null,null,10,null,"IR",{"$nulls":6},1,null,null,null,20,null,null,null,"-0.4 *1",null,null,null,"-",null,null,null,"67/50",{"$nulls":7},"area 2",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"AIR",null,null,null,100,null,null,null,"-",{"$nulls":7},"-"]
["BBB-02",{"$nulls":5},"1-10",null,null,10,null,"IR",{"$nulls":6},1,null,null,null,20,null,null,null,"-0.6 *1",null,null,null,"-",null,null,null,"67/50",{"$nulls":7},"area 3",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"AIR",null,null,null,100,null,null,null,"-",{"$nulls":7},"-"]
["BBB-02",{"$nulls":5},"1-10",null,null,10,null,"IR",{"$nulls":6},1,null,null,null,20,null,null,null,"-0.8 *1",null,null,null,"-",null,null,null,"67/50",{"$nulls":7},"area 4",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"AIR",null,null,null,100,null,null,null,"-",{"$nulls":7},"-"]
[]
["CCC-03",{"$nulls":5},"10-25",null,null,15,null,"Green",{"$nulls":6},3,null,null,null,"-",null,null,null,1.5,null,null,null,700,null,null,null,"67/50",{"$nulls":7},"all area",{"$nulls":7},2,null,null,null,"鏡面",null,null,null,"AIR",null,null,null,100,null,null,null,"Glass / 850",{"$nulls":7},"-"]
{"$rows_empty":9}
["　連絡事項",{"$nulls":5},"　(お客様　コメント欄)",{"$nulls":29},"　(住重アテックス　コメント欄)"]
["ウエハのNo.はVノッチ付近に刻印してあります。\n\n*1 IRは溶融閾値の確認は、No.1のウエハの端を使用して確認をお願いします。\n\n*2 照射エリアの詳細については、別紙資料を参照ください。"]
[]
[]
[]
[]
["輸送箱数",{"$nulls":8},"箱数："]
["（返却先住所）",{"$nulls":35},"工番",{"$nulls":34},"内容確認","品質技術G"]
["〒141-××××　東京都　○○区　△△　1-1-1\n○○工業株式会社　半導体製造工場　A棟\n検査　太郎",{"$nulls":71},"月　　　日　"]
[]
[{"$nulls":72},"印"]
[]
["（返却先電話番号）",{"$nulls":5},"03-××××-××××"]
[]
["*画像アライメントが登録できない場合、画像アライメントなしのエッジカット3mmでの処理となります。",{"$nulls":65},"シート更新時確認欄"]
[{"$nulls":66},"お客様確認",{"$nulls":5},"住重アテックス確認"]
[{"$nulls":66},"月　　　日　",{"$nulls":5},"月　　　日　"]
[]
[]
[{"$nulls":66},"サイン",{"$nulls":5},"サイン"]